It will use bothOriginally Posted by Oliverda
Thanks.
If I'm not mistaken GF's 32nm SOI process tech will use high-k dielectric instead of low-k dielectric.
High-k in the HKMG transistors and low-k to embed the wires.
Regards, Hans
It will use bothThanks.
If I'm not mistaken GF's 32nm SOI process tech will use high-k dielectric instead of low-k dielectric.
High-k in the HKMG transistors and low-k to embed the wires.
Regards, Hans
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