http://download.intel.com/pressroom/..._Bohr_32nm.pdf
This is what I could find after a quick google -- page 7.
Don't confuse immersion lithography as a 'lead', immersion techniques is just that a new technique to enable printing the minimal size necessary. You get what you get, whether you print it with dry, immersion, or a hyperfine atomically sharp pencil, it doesn't matter -- it is simply a chosen technique to do what is necessary to meet the requirements. Immersion litho by itself does nothing to improve the performance of the device, it's just a printing technique.
I would think it is considered better engineering if you can make older lithography work as opposed to having to turn to something more complex. I think (and someone correct me if I am wrong), Intel used double patterning in 45 nm rather than try immersion.
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