News: TSMC has 45nm prototypes

[Cooper]

TSMC official press release says about new production method in semiconductor technology and is based on Immersion Lithography.
TSMC made several prototypes which have great yields - 7 defects on 12inch (300mm) waffer. Some waffers had only 3 defects on them.

TSMC website (http://www.tsmc.com/english/default.htm#)

[onewingedangel]

The article doesn't say that the prototypes were 45nm, but rather that immersion lithography was being targetted to be put to use in the 45nm process. The prototypes may have been 65, 80, 90 or even 110nm in size - it was a test of immersion lithography not of immersion lithography at 45nm.

[krille]

So what's all this "immersion lithography" business about? Anyone up for providing a short sum-up?

[onewingedangel]

http://en.wikipedia.org/wiki/Immersion_lithography